Product Description of Phosphine CAS#7803-51-2
Phosphine (CAS#7803-51-2), with the molecular formula PH₃, is a colorless, highly reactive gas known for its strong reducing properties and specialized industrial applications. It is primarily produced for use in semiconductor manufacturing, electronic material processing, and agricultural fumigation.
In the semiconductor industry, phosphine serves as an important dopant source, providing phosphorus atoms for modifying the electrical characteristics of semiconductor materials. Its high purity and precise reactivity make it a valuable gas for advanced manufacturing processes.
Due to its high toxicity, flammability, and potential hazards, phosphine requires strict storage, transportation, and handling procedures. Proper safety controls and professional management are essential to ensure safe use in industrial and research environments.
Key Specifications
| Parameter | Electronic Grade | Industrial Grade |
| Purity | ≥99.999% | ≥99.9% |
| O₂ Content | ≤0.5 ppm | ≤50 ppm |
| H₂O Content | ≤1 ppm | ≤10 ppm |
| Total Impurities | ≤10 ppm | ≤1000 ppm |
Product Usage of Phosphine CAS#7803-51-2
1. Semiconductor and Electronic Material Manufacturing
Phosphine is widely used as a phosphorus-containing dopant gas in semiconductor fabrication processes. It provides precise control over the electrical properties of silicon materials during n-type doping, helping achieve uniform and stable semiconductor performance.
It is also utilized in MOCVD (Metal Organic Chemical Vapor Deposition) processes for the preparation of GaN-based optoelectronic materials, including advanced LED manufacturing applications.
2. Grain Storage and Fumigation Applications
Phosphine serves as an effective grain fumigant for stored agricultural products, offering strong pest control performance against insects and other storage pests. It provides efficient fumigation results with low residue characteristics, making it an important alternative to traditional fumigation agents in agricultural protection.
3. Chemical Synthesis and Fine Chemical Applications
In chemical research and synthesis, phosphine is used as a valuable reagent and ligand source in various catalytic reactions. It plays an important role in organic synthesis, asymmetric catalytic processes, and the preparation of chiral pharmaceutical intermediates, supporting the development of advanced chemical products.
Due to its unique chemical properties, phosphine remains an important specialty gas for applications in semiconductor manufacturing, agricultural fumigation, and fine chemical synthesis.
